Szczegóły Produktu
| Zanieczyszczenia | NF3≥99,995% obj.% | NF3≥99,99% obj.% | NF3≥99,98% obj.% | NF3≥99,9% obj.% |
| CF4 | ≤20 obj.ppm | ≤40 obj.ppm | ≤100 obj.ppm | ≤500 obj.ppm |
| N2 | ≤5 obj.ppm | ≤5 obj.ppm | ≤10 obj.ppm | ≤50 obj.ppm |
| O2+Ar | ≤3 obj.ppm | ≤5 obj.ppm | ≤10 obj.ppm | ≤50 obj.ppm |
| CO2 | ≤1 obj.ppm | ≤5 obj.ppm | ≤10 obj.ppm | ≤10 obj.ppm |
| H2O | ≤1 obj.ppm | ≤1 obj.ppm | ≤1 obj.ppm | ≤1 obj.ppm |
| HF | ≤1 obj.ppm | ≤1 obj.ppm | ≤1 obj.ppm | ≤1 obj.ppm |
| SF6 | ≤1 obj.ppm | ≤2 obj.ppm | ≤2 obj.ppm | ≤25 obj.ppm |
| N2O | ≤1 obj.ppm | ≤5 obj.ppm | ≤10 obj.ppm | ≤10 obj.ppm |
| CO | ≤0,5 obj.ppm | ≤5 obj.ppm | ≤10 obj.ppm | ≤10 obj.ppm |
Pakiet
| Produkt | Trifluorek azotu NF3 w płynie | |
| wielkość paczki | Cylinder 44L | Cylinder 440 litrów Zbiornik ISO |
| Napełnienie Masa netto/Cyl | 20 kg | 200 kg |
| ILOŚĆ Załadowana w kontenerze 20' | 200 cylindrów | 20 cylindrów |
| Całkowita waga netto | 4 tony | 4 tony |
| Masa tary cylindra | 50 kg | 240 kg |
| Zawór | CGA/DISS640 | |
