Product details
|
Impurities |
NF3≥99.995% Vol.% |
NF3≥99.99% Vol.% |
NF3≥99.98% Vol.% |
NF3≥99.9% Vol.% |
|
CF4 |
≤20 Vol.ppm |
≤40 Vol.ppm |
≤100 Vol.ppm |
≤500 Vol.ppm |
|
N2 |
≤5 Vol.ppm |
≤5 Vol.ppm |
≤10 Vol.ppm |
≤50 Vol.ppm |
|
O2+Ar |
≤3 Vol.ppm |
≤5 Vol.ppm |
≤10 Vol.ppm |
≤50 Vol.ppm |
|
CO2 |
≤1 Vol.ppm |
≤5 Vol.ppm |
≤10 Vol.ppm |
≤10 Vol.ppm |
|
H2O |
≤1 Vol.ppm |
≤1 Vol.ppm |
≤1 Vol.ppm |
≤1 Vol.ppm |
|
HF |
≤1 Vol.ppm |
≤1 Vol.ppm |
≤1 Vol.ppm |
≤1 Vol.ppm |
|
SF6 |
≤1 Vol.ppm |
≤2 Vol.ppm |
≤2 Vol.ppm |
≤25 Vol.ppm |
|
N2O |
≤1 Vol.ppm |
≤5 Vol.ppm |
≤10 Vol.ppm |
≤10 Vol.ppm |
|
CO |
≤0.5 Vol.ppm |
≤5 Vol.ppm |
≤10 Vol.ppm |
≤10 Vol.ppm |
Package
| Product | Nitrogen Trifluoride NF3 Liquid | |
| Package Size | 44Ltr Cylinder | 440Ltr Cylinder
ISO Tank |
| Filling Net Weight/Cyl | 20Kgs | 200Kgs |
| QTY Loaded in 20’Container | 200 Cyls | 20 Cyls |
| Total Net Weight | 4 Tons | 4 Tons |
| Cylinder Tare Weight | 50Kgs | 240Kgs |
| Valve | CGA/DISS640 | |
