Product Specification
| Item | Index | ||
| CF4V/V）≥ | 99.999 | 99.995 | 99.99 |
| N210-6(V/V) ≤ | 4 | 20 | 40 |
| O210-6(V/V) ≤ | 1 | 5 | 10 |
| CO210-6(V/V) ≤ | 1 | 5 | 10 |
| CO， 10-6(V/V) ≤ | 0.3 | 0.5 | 1 |
| SF610-6(V/V) ≤ | 1 | 1 | 5 |
| H2O， 10-6(V/V) ≤ | 1 | 5 | 10 |
| HF， 10-6(V/V) ≤ | 0.1 | 0.3 | 0.3 |
| TFC(CH2F2CHF3C2F3C3F8)，10-6(V/V) ≤ | 1 | 10 | 30 |
| ppm (V/V) ≤ | 10 | 50 | 100 |
| Cylindrus No. | DOT/48.8 L | DOT/47L | 40L | 10L | 4L |
| Valvae No. | CGA580, CGA590, CGA320, DISS716 | ||||
