Sonraí táirge
| Neamhíonachtaí | NF3≥99.995% Vol.% | NF3≥99.99% Vol.% | NF3≥99.98% Vol.% | NF3≥99.9% Vol.% |
| CF4 | ≤20 Vol.ppm | ≤40 Vol.ppm | ≤100 Vol.ppm | ≤500 Vol.ppm |
| N2 | ≤5 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤50 Vol.ppm |
| O2+Ar | ≤3 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤50 Vol.ppm |
| CO2 | ≤1 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
| H2O | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm |
| HF | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm |
| SF6 | ≤1 Vol.ppm | ≤2 Vol.ppm | ≤2 Vol.ppm | ≤25 Vol.ppm |
| N2O | ≤1 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
| CO | ≤0.5 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
Pacáiste
| Táirge | Trífhluairíd Nítrigine Leacht NF3 | |
| Méid Pacáiste | Sorcóir 44Ltr | Sorcóir 440Ltr Umar ISO |
| Glanmheáchan/Cil | 20kg | 200kg |
| QTY Luchtaithe i 20'Coimeádán | 200 Ciorcal | 20 Cyls |
| Meáchan Glan Iomlán | 4 Tona | 4 Tona |
| Meáchan Tare Sorcóir | 50kg | 240kg |
| comhla | CGA/DISS640 | |
